Abstract
In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 <TEX>$m^3/h$</TEX> that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.
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