Abstract
Discharge characteristics at 1 MHz in C4F8/O2 mixture at the total pressure of 66.5 Pa (0.5 Torr) have been investigated by electrical and optical methods. As increasing the C4F8 ratio, the discharge-sustaining voltage (DSV), the discharge current and its leading angle to DSV decrease. At C4F8 ratio greater than 20%, the electron temperature is higher than that in O2 discharge, and furthermore the intense photo-emission in front of both the instantaneous anode and the instantaneous cathode is observed around the phases of ωt = π/2 and 3π/2. This emission profile is similar to that in strong electronegative SF6 discharge. The experimental results show that the discharge characteristics of C4F8/O2 mixture as same as those of C4F8 gas are similar to those of strong electronegative SF6 gas.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
