Abstract
Magnetic and structural properties of multilayered FeSiN/Ceramics films produced by dual-type sputtering were investigated. Laminating the FeSiN with ceramics layers enhanced not only frequency response of permeability (μ), but also the level of μ. These soft magnetic properties of as-deposited films were found to be strongly related to the substrate temperature (Tsub.), but independent from the kind of ceramics. The multi-layered FeSiN/A1N films deposited at the Tsud.=300°C exhibited large μ (at 5 MHz) of about 5,000 and saturation induction (Bs) more than 17 kG. SEM observation suggested that soft magnetic properties of FeSiN base multi-layers arose from the decrease of magnetic anisotropy of the assembly of magnetically interacted small grains and also from the (111) plane orientation of the grains. The most multi-layered films exhibited greater thermal resistance to aging up to 600°C, because the ceramics layers prevent the grain growth of α-Fe.
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