Abstract

The Tantalum nitride has attracted wide at attention as issues related to the toxicity of Cd-related materials. But in the titration process of TaCl? solution with NH₄OH, NH₄Cl, as a by product, was remained in the prepared Tantalum precursor. The tantalum precursor with NH₄Cl was nitrided by ammonolysis. The red color tone of Ta₃N? was reduced by the residual NH₄Cl reduce. Therefore, amorphous Tantalum precursor was prepared by filtering process with as hydrous ethanol to remove the NH₄Cl. In the case of using Tantalum precursor without NH₄Cl, we successfully synthesized the Tantalum nitride with good red color. The value of red color tone was improved from a * =36.8 to a * =53.0. The synthesized powder was characterized by XRD, SEM, the Nitrogen / Oxygen Determinator, TG-DTA, and the CIE L * a * b * colorimeter.

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