Abstract
Cu doped <TEX>$SnO_2$</TEX> thick films for gas sensors were fabricated by screen printing method on alumina substrates and annealed at <TEX>$500^{\circ}C$</TEX> in air, respectively. Structural properties of <TEX>$SnO_2$</TEX> by X-ray diffraction showed (110), (101) and (211) dominant tetragonal phase. The effects of catalyst Cu in <TEX>$SnO_2$</TEX>-based gas sensors were investigated. Sensitivity of <TEX>$SnO_2$</TEX>:Cu sensors to 2,000 ppm <TEX>$CO_2$</TEX> gas and 50 ppm <TEX>$H_2S$</TEX> gas was investigated for various Cu concentration. The highest sensitivity to <TEX>$CO_2$</TEX> gas and <TEX>$H_2S$</TEX> gas of Cu doped <TEX>$SnO_2$</TEX> gas sensors was observed at the 8 wt% and 12 wt% Cu concentration, respectively. The improved sensitivity in the Cu doped <TEX>$SnO_2$</TEX> gas sensors was explained by decrease of electron depletion region in Cu and <TEX>$SnO_2$</TEX> junction, and increase of reactive oxygen and surface area in the <TEX>$SnO_2$</TEX>.
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