Abstract
The results of an experimental study of the possibility of applying diamond coatings to substrates made of various materials by a new gas-jet method with microwave activation of precursor gases are presented. The developed experimental setup for applying diamond coatings is described. Diamond coatings are deposited on substrates of molybdenum, silicon with an oxide film or silicon carbide on the surface, tungsten carbide, titanium nitride, fused quartz, and on a diamond crystal. Under conditions of high temperatures and high heat fluxes to the substrate, it was possible to ensure its integrity due to the use of a specially developed substrate holder design. The resulting samples of diamond coatings were studied by scanning electron microscopy (SEM) and Raman spectroscopy (RS) and are currently being tested under the conditions required for various applications.
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