Abstract
In this paper, the <TEX>$CF_4$</TEX> decomposition rate and by-product were investigated for two simulated plasma reactors which are metal particle reactor and spiral wire reactors as a function of mixed gases. The <TEX>$CF_4$</TEX> decomposition rate by plasma reactor with metal particle electrode had a gain of 20~25% over that by plasma reactor with spiral wire electrode. The <TEX>$CF_4$</TEX> decomposition efficiency increases with increasing applied voltage up to the critical voltage for spark formation. The <TEX>$CF_4$</TEX> decomposition efficiency of metal particle reactor was about 80% at AC 24kV. The <TEX>$CF_4$</TEX> decomposition rate used Ar-<TEX>$N_2$</TEX> as base gas was the highest among three base gases of <TEX>$N_2$</TEX>, <TEX>$Ar-N_2$</TEX>, air. The by-products of the <TEX>$N_2$</TEX>, <TEX>$N_2Ar$</TEX> base as were similar, but in case of air base they were different.
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