离子束溅射制备“日盲”紫外诱导透射滤光片

Abstract

Solar-blind UV induced Transmission Filters(SBU-ITFs) were fabricated by ion-beam sputtering.Firstly,SBU-ITFs were designed and analyzed theoretically,and the deposition of ZrO_2,SiO_2 and Al films by ion beam sputtering was optimized.The optical constants of ZrO_2 and SiO_2 films were derived from the transmitting and reflecting spectra,and the optical constant of Al film was determined by the inversion of the variable incidence ellipsometric spectrum of a sample JGS1/SiO_2/Al/SiO_2/air(SAS).On the basis of the research,the SBU-ITFs were fabricated by using the three films above and their optical properties were measured.The measurement for SBU-ITFs shows that the peak transmittance of the filter at the 264 nm center wavelength is larger than 60%,the transmittance band width(FWHM) is about 13 nm,and the optical density in the 300-350 nm cutoff spectral region reaches to 2.6.The analysis of the transmittance shows that the main factors affecting the properties of SBU-ITFs are a slower deposition speed for Al film and smaller amount of O_2 contents remaining in the chamber during the deposition of Al film.