Ｃｏｕｎｔｅｒ Ｆｌｏｗ型リークディテクターによる洩れの検出限界について 検出感度向上のための提案

Abstract

Paying attention to a two-inlet turbomolecular pump and a new counter-flow leak detector proposed by G. Reich, we made a general survey of leak-detection systems. Among many types of leak-detection systems, we selected several of them, including a system with a new type counter-flow leak detector, and analysed their performances. To evaluate leak-detection performance of the systems, minimum detectable leak and time constant of response are introduced. In terms of these quantities, we evaluate the leak-detection performance of the systems, and explore the leak-detection limit.