接触する微小２平面間に作用する凝着力 寸法，雰囲気および表面濡れ性の影響

Abstract

Adhesion force, exactly standing for pull-off force, between tiny flat surfaces was measured. Adhesion force that acts between two mating surfaces becomes dominant factor in microscopic mechanisms. Sometimes it becomes larger than the weight of the moving part and restricts its motion. This paper describes the measurement method of adhesion force first. A silicon slider (chip) is placed on an inclined guide that is vibrated by a voice coil motor, and the adhesion force is calculated from the slider's mass and the critical acceleration that the slider begins to slide down. It was found that the adhesion force is ideally proportional to the nominal contact area in vacuum though it is not proportional in air. Also, the effect of the wettability of the surface on the adhesion force was made clear. These results suggest that the elimination of water capillary from interface of the mating surfaces is important to obtain steady motion of the mechanism.