Abstract
A high precision mounting robot system consisting of SCARA robot and fine motion mechanism attached to the end effector of the robot is being developed by authors, This paper introduces basic concept and design specification of the system, and describes the design and capability of developed X-Y axes fine motion mechanism for this purpose in details. Developed fine motion mechanism is composed of piezo-electric actuator and displacement magnifying mechanism with elastic hinge. Detailed structure of the mechanism is designed by simulation based on FEM. Experimental results of positioning show the effectiveness of developed fine motion mechanism.
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