Abstract
The vapor deposition of TiO2 films by the decomposition of ethyl, isopropyl, n-butyl and t-butyl titanates was investigated. The deposits obtained at optimum conditions from the above complexes were identified respectively, as rutile, anatase, anatase containing a small quantity of rutile, and almost pure brookite. Thus any of the crystalline modifications of TiO2 can be obtained by selecting the appropriate complex and decomposition conditions. Tentative decomposition schemes are presented and discussed.
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