Abstract
Our previous study showed that the spontaneous electric polarization and electric coercivity of Fe-B-O sputtered films were subject to drastic change by ambient humidity, suggesting that these films are attractive as constiuent materials for humidity sensors. In the studies, however, the film was maintained almost irrespective of the film composition of the sputtering target with Fe2O3 and B2O3 mixture powders, and hence, correlation between the film composition and the humidity sensing characteristics could not be studied. In this study, using the composite target with B chips that were placed uniformly on an Fe2O3 target to form the Fe-B-O films, the humidity sensing characteristics were investigated. The results strongly indicate that there exists an optimum composition of film for micro-humidity sensors using these films.
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