無電解Ｎｉ‐Ｍｏ‐Ｐ合金皮膜の結晶化におよぼすＭｏ原子の影響

Abstract

The thermal stability of amorphous Ni-Mo-P alloy films deposited from an electroless plating bath was investigated by comparing with ordinary amorphous Ni-P alloy films by DSC analysis and TEM observation. The amorphous Ni-Mo-P films display a higher activation energy of Ni3P formation, and thus tend to crystallize less readily than the amorphous Ni-P film. Structural observations by TEM and THEED, show that the structural change in the Ni-Mo-P films occurs at higher temperature region than that in the Ni-P films for films of the same P content. The films of amorphous Ni-Mo-P and Ni-P at the same enthalpy for Ni3P formation show structural changes at the same temperature.