Abstract
Accurate control of tools in precise machining requires force information to compensate for force induced deformation. Many, types of force sensors with strain gauges or piezo elements have been developed. However, usual force sensors may disturb a machining system because of their low rigidity. The authors propose an active force sensor which has an actuation capability and a detection capability for force and displacement. This sensor can improve its rigidity using the actuation. Prototypes of the active force sensor are fabricated and examined. It is confirmed that the prototype with a piezo device and two pairs of parallel plates is superior in terms of stability and sensitivity in force and displacement detection.
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