格子パターン投影法を用いた反射物体の表面形状計測 （第２報） 楕円面鏡の計測

Abstract

This paper describes a grating projection method for three-dimensional profile measurement of specular objects and the method is utilized to measure a concave-shaped mirror that is difficult to measure using conventional non-contact methods in short time. A "deformed grating pattern" is observed when the reference grating is projected onto a mirror-like surface. This pattern formed by the surface reflection is captured by a CCD camera and analyzed on the basis of phase shifting technique to give three-dimensional profile of the specimen. Experimental results are shown with respect to an ellipsoidal mirror to verify the principle proposed here.