Abstract
From 1980, various kinds of biosensors based on ion sensitive field effect transistors (ISFETs) were developed. The key technology of the semiconductor biosensor is the precisely controlled miniatualized enzyme-immobilized membrane fabrication technology. To realize a first single chip biosensor based on an ISFET, Ultra-Violet irradiation method was developed in 1984 at the authors laboratory. Two additional methods of immobilized-enzyme membrane were developed in the laboratory. To realize a miniatualized multi-enzyme sensor, an ink jet nozzle method was adapted as a tool of enzyme supply. The most advantage method to fabricate a small enzyme-immobilized membrane is a lite off method which is one of the photo-lithography method, so that the wafer level enzyme-immobilized membrane fabrication method was become to be easy. In this paper, above various enzyme-immobilized methods were reviewed.
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