Abstract
ベンゾシクロブテン(BCB)薄膜多層配線基板
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https://doi.org/10.5104/jiep1985.7.23
Copy DOIJournal: HYBRIDS | Publication Date: Jan 1, 1991 |
License type: free |
ベンゾシクロブテン(BCB)薄膜多層配線基板
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