Abstract

thin film phosphors have been deposited using a pulsed laser deposition method on Si(100) substrates at a substrate temperature of with oxygen pressures of 100mTorr, and subsequently to investigate their photoluminescence characteristics after post-annealed at and . As a result for X-ray diffraction, shape appeared with increasing annealing temperature. The luminescent spectra show a broad band extending from 350 to 600nm peaking at 460nm. A post-annealing treatment of thin films led to the different shape of luminescent intensity and grain size.

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