Abstract

In this study, we fabricated thin film solid oxide fuel cells on nanoporous anodic aluminum oxide (AAO) substrate for low-temperature operation using the all-through sputtering method. To deposit up to a three-micrometer thick anode with both porosity and electrical conductivity, we used the glancing angle deposition and co-sputtering methods. For the anode materials, we used nickel gadolinium-doped-ceria (Ni-GDC) mixed ionic and electronic conductor (MIEC), which improved hydrogen oxidation reaction reactivity at the anode side. TF-SOFCs were successfully operated at 500℃, and 223.6 mW/cm² was their highest measured maximum power density. We conducted structural and electrochemical analyses to figure out cells’ unique resistant characteristics; ohmic resistance through the anode thin film and polarization resistance of reaction area near the narrowed anode pores. We found how the anode thin film thickness affects the current collecting performance and the anode reactivity, and their effects were qualitatively and quantitatively compared.

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