Abstract

저손실의 높은 편광 소멸비를 갖는 LiNbO<TEX>$_3$</TEX> 도파로를 만들기 위하여 고온 양자교환 방법을 이용하였다. 이 방법으로 제작된 도파로의 굴절률 특성을 분석하기 위하여 프리즘 결합기 방법으로 도파 모드를 측정하고 IWKB(inverse WKB) 방법을 사용하여 표면 굴절률 변화와 깊이에 대한 굴절률 분포 특성을 관찰하였다. 이러한 방법으로 고온 양자교환법의 주요 인자인 양자교환 온도, LS 농도, 양자교환 시간에 대한 굴절률 변화를 분석하였다. The high temperature proton exchange (HTPE) method was used to fabricate optical waveguides based on LiNbO<TEX>$_3$</TEX>, which gives rise to low propagation loss and high polarization extinction ratio. To characterize the refractive index distribution of the fabricated waveguides, the guided modes of each waveguide were observed using the prism coupling method and then the refractive index profile was calculated by the inverse WKB method with the least square fitting. Finally, we showed how the HTPE parameters such as the temperature of PE, the concentration of lithium additive, and the time of PE effect the refractive index profile.

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