Abstract
This paper describes the information for quantitative simulation of weakly ionized plasma. In previous paper, we calculated the electron transport coefficients by using two-term approximation of Boltzmann equation. But there is difference between the result of the two-term approximation of the Boltzmann equation and experiments in pure CF<TEX>$_4$</TEX> molecular gas and in CF<TEX>$_4$</TEX>+Ar gas mixture. Therefore, In this paper, we calculated the electron drift velocity (W) in pure CF<TEX>$_4$</TEX> molecular gas and CF<TEX>$_4$</TEX>+Ar gas mixture (1 %, 5 %, 10 %) for range of E/N values from 0.17～300 Td at the temperature was 300 K and pressure was 1 Torr by multi-term approximation of the Boltzmann equation by Robson and Ness. The results of two-term and multi-term approximation of the Boltzmann equation have been compared with each other for a range of E/N.
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