Abstract
The conditions have been established for detection and recognition of rotation domains in α–Ga2O3/α–Al2O3 (0001) thin films in the presence of other polymorphs. The domains are visualized by high-resolution transmission electron microscopy. Their structural characteristics are determined by preparing cross-sectional and plan-view specimens, choosing the correct diffraction conditions and proper imaging modes. As a result, the dimensions, the spatial distribution, the volume fraction and area fraction of the inclusions of domains have been determined.
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