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Open Accesshttps://doi.org/10.3131/jvsj.41.992
Copy DOI Journal: SHINKU |  Publication Date: Jan 1, 1998 |
 Citations: 1 |  License type: free |
Affiliation: Tohoku UniversityＳｉ表面の炭素系ガスによる汚染，吸着，反応 シリコン表面の炭化反応
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