Abstract
In this short article the features of extended energy-loss fine structure (EXELFS) in electron energy-loss spectroscopy (EELS) associated with transmission electron microscopy (TEM) are introduced as one of the useful methods for structural analysis in a localized area. After briefly describing the principle and analysis method of EXELFS, several interesting application examples of EXELFS in materials science are presented. Finally the standing problems in EXELFS analysis and future prospects are addressed.
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