Abstract
This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical composition, physical and electrical properties and thermal stability ranges of the <TEX>$CrO_{x}$</TEX> sensing elements have studied. <TEX>$CrO_{x}$</TEX> thin films with a linear gauge factor(GF<TEX>${\fallingdotseq}$</TEX>15), high electrical resistivity (<TEX>${\rho}$</TEX> = <TEX>$340{\mu}{\Omega}cm$</TEX>) and TCR<-55 ppm/<TEX>$^{\circ}C$</TEX> have been obtained. These <TEX>$CrO_{x}$</TEX> thin films may allow high temperature pressure sensor miniaturization to be achieved.
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