Abstract
Co-Pd-Mn-O granular soft magnetic films with high electrical resistivity were successfully prepared by the reactive deposition method using an O2 molecular beam followed by magnetic field annealing. The films with good soft magnetic properties show Hc of ∼0.3 Oe, 4πMs of ∼7400 G, a uniaxial anisotropy field of ∼120 Oe, and resistivity of ∼200 μΩcm. Such films were found to be composed of oxides of Mn and fcc Co-Pd granules with a particle size of ∼1.5 nm.
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