Abstract
Although stylus profilometers are now widely used, recent development of single point diamond turning and semiconductor technology strongly require to come out non-contact precise surface sensors. This is mainly because the stylus may scratch the surface of soft metal, thin film, silicon wafer, and so forth. Some non-contact surface measurement methods have been developed. Most of them, however, are complex, expensive, too large, low resolution, or simply hard to handle. Applying the principle of focus detection by critical angle of total reflection, a practical non-contact sensor to measure the surface roughness or the micro-figure of diamond turned metal mirror is developed and named HIPOSS-1 (HIgh Precision Optical Surface Sensor-1). HIPOSS-1 shows 20 nm resolution about vertical direction and is so compact and light weight. And it is interchangeable to a pick-up head of stylus profiling instrument.
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