Abstract
In this study, we carried out a basic study for the development of optical transcutaneous <TEX>$pCO_{2}$</TEX> gas sensor and analyzer using non-invasive method. The basic principle of <TEX>$pCO_{2}$</TEX> measurement is adapted Beer lambert's law and embodied the system using NDIR method. This measuring system was composed of a IR lamp, a optical filter, a optical reaction chamber, pyroelectric sensor and a signal process. We measured <TEX>$EtCO_{2}'s$</TEX> concentration in basis step instead of <TEX>$pCO_{2}$</TEX> gas that can collect by inflicting heat in outer skin. We minimize the size of optical reaction chamber which takes up the largest volume, to make the portable sensor. We made optical reaction chamber in Si wafer using MEMS technology and the optical reaction chamber was shortened to 2 mm and we carried out an experiment. When we injected the <TEX>$EtCO_{2}$</TEX> to the inside of the optical reaction chamber, we could confirm change of 4.6 mV. The system response time was within 2 second that is fairly fast.
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