Abstract
SF6 (Sulfur hexafluoride) possesses high GWP (Global Warming Potential) as sepcified by the IPCC (Intergonvernmental Panel of Climate Change). Recently, the recovery-separtion of SF6 research area, including permeation properties studies using various membrane's materials and the practical operation of recovery-separtion using membrane of waste SF6 gas is in the initial state. The separation efficiency of a single SF6 and waste SF6 mixture was evaluated using a PSF (polysulfone), PC (tetra-bromo poly- carbonate) and PI (polyimide) hollow fiber membranes. According to the results of single gases permeation properties, PI mem- brane has the highest permselectivity of N2 gas in N2/SF6 gas. Under the condition of P=0.5 MPa, the highest concentration of recovered SF6 is 95.6 vol % in the separation experiment of SF6/N2 mixture gas by PC membrane. Under the operation pressure of P=0.3 MPa at a fixed retentate flow rate fixed of 150 cc/min, the maximum recovery efficiency of SF6 is up to 97.8% by PSF membrane. From the results above, it is thought that the separation and recovery technique of SF6 gas using membrane will be used as the representative eco-technology in the SF6 gas treatment in the future.
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