Abstract
Ti-indiffused LiNbO<TEX>$_3$</TEX>waveguide have been used to various high speed optical device based on electro-optic effect such as modulators, switches, and sensor, etc. In order to high speed modulation of optical modulator have, one of the further devices, needed to increasing of electrode surrounding air by LiNbO<TEX>$_3$</TEX>dry etching because of impedance matching for optical and RF phase velocity between waveguide and electrode. We studied property of LiNbO<TEX>$_3$</TEX>dry etching after waveguide patterning lot optical modulation by using neutral loop discharge (NLD) plasma.
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Schedule a callMore From: Journal of the Korean Institute of Electrical and Electronic Material Engineers
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