Abstract
Abstract The present paper reviews the micro and nano nondestructive evaluation(NDE) technique that is possible to investigate the surface and measure the acoustic properties. The technical theory, features and applications of the ultrasonic atomic force microscopy(UAFM) and scanning acoustic microscopy(SAM) are illustrated. Especially, these technologies are possible to evaluate the mechanical properties in micro/nano structure and surface through the measurement of acoustic properties in addition to the observation of surface and subsurface. Consequently, it is thought that technique developments and applications of these micro/nano NDE in advanced industrial parts together with present nondestructive industry are widely possible hereafter. Keywords: Micro and Nano, Nondestructive Evaluation, Acoustic Properties, Surface, Mechanical Property[해설논문] - 비파괴검사학회지 Journal of the Korean Societyfor Nondestructive TestingVol. 32, No. 4 (2012. 8) [접수일: 2012. 5. 2, 수정일: 2012. 6. 15, 게재확정일: 2012. 6. 20] *한양대학교 자동차공학과, **서울과학기술대학교 기계자동차공학과, ✝Corresponding Author: Mechanical and Automotive Engineering, Seoul National University of Science and Technology, Seoul 139-743, Korea (E-mail: ikpark@seoultech.ac.kr)
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