Abstract
고주파 여기 방식의 슬랩 도파관 <TEX>$CO_2$</TEX> 레이저를 제작하고 그 특성을 조사하였다. 레이저 이득을 얻기 위한 고주파 방전구간의 크기는 2<TEX>${\times}$</TEX>40<TEX>${\times}$</TEX>400mm이고, 레이저 공진기는 볼록거울과 오목거울을 사용하여 positive branch형태의 불안정 공진기를 사용하였다. 고주파 여기 주파수는 123 MHz를 사용하였고, 가스의 혼합 비율은 <TEX>$CO_2$</TEX>:<TEX>$N_2$</TEX>:He를 각각 1:1:3으로 사용하였다. 공진기의 가스 압력이 40 ton,고주파 입력파워 900 W에서 70.8 W의 출력을 얻었으며, 이때 레이저의 효율은 9.2%이다. We have developed a radio frequency excited slab waveguide <TEX>$CO_2$</TEX> laser. The dimension of active volume is 2<TEX>${\times}$</TEX>40<TEX>${\times}$</TEX>400 mm. One concave and one convex mirror are used to make the unstable resonator of the positive branch. The radio frequency is 123 MHz and RF input power is varied from 100 to 900 W. The laser gas is set to a pressure of 10∼60 torr and the mixing ratio is <TEX>$CO_2$</TEX>:<TEX>$N_2$</TEX>:He=1:1:3. The laser output power of 70.7 W was obtained which corresponds to laser power to RF power conversion efficiency of 9.2%.
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