Abstract
Microwave plasma enhanced chemical vapor deposition (PECVD) can offer high purified carbon materials, such as graphene, carbon nanotube, and carbon nanowall. Among them, carbon nanowall is grown from nucleation on substrate at comparatively low temperature because it need not catalyst materials. Instead, ratio by contents of gas is very significant. Herein, we report change in structural and electrical properties of carbon nanowall through gas ratio that is varied contents of two reaction gas. In FE-SEM analysis, carbon nanowall showed two-typed morphology and the number of pores with pore’s scale was different with increase of hydrogen gas flow rate. In FE-SEM analysis, two geometric morphology of carbon nanowall were confirmed with pore
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