Abstract
For commercialized servo drives of the motion stage to include embedded controller, external terminal is provided for tracking command and encoder output, but internal terminal is not for control input. Thus, it is difficult to combine out signal of embedded controller with that of external compensator such as disturbance observer. In this study, for precise tracking control of motion stage without hardware change of the servo drive, tacking control system is composed of an inner loop of servo drive and an outer loop of disturbance observer. Then, the control system is designed so that the output response of actual plant corresponds with nominal model's in transient state as well as in steady state. Finally, the experiment results show that the designed control system is effective to reconcile actual plant behavior with nominal model under nonlinear friction and parameter perturbation.
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