ＨＣＤ（Ｈｏｌｌｏｗ Ｃａｔｈｏｄｅ Ｄｉｓｃｈａｒｇｅ）法による窒化チタン膜の色彩に及ぼす添加ガスの影響

Abstract

Quantitaive evaluation was made on the effect on the color of titanium nitride films prepared by the hollow cathode discharge (HCD) process of the addition of various gases including hydrocarbon, oxygen, hydrogen and ammonia to nitrogen gas during deposition. An intergrating sphere with specular cap was used as the optical instrument. CIE 1931 chromaticity coordinates as defind by JISZ 8701 and the Munsell Renotation system as defined by JISZ 8721 were employed to indicate film color. Film color changed to reddish and both Munsell value and chroma decreased with the addition of either methane or acetylene, but the effect of acetylene was the stonger. X-ray analysis showed that the carbon content of titanium nitride film depend upon the quantity of hydrocarbon gas added to nitrogen gas, and carbon atoms in the film played an important role in its color. The addition of oxygen decreased Munsell value, and the hue turned reddish. The addition of hydrogen had no significant effect on hue and value but decreased chroma. The addition of ammonia gave color almost the same effect as did hydrogen and large amount of ammonia produced and increased in chroma. It is concluded that the color of titanium nitride film is mainly depended upon the amount of gas atoms that it contains.