Abstract
A perovskite type of (La, Sr)MnO3 films were deposited on SiO2/Si substrates with amorphous surface by using the facing targets sputtering system. La1-xSrxMnyO3 targets were prepared by the conventional sintering method from starting powders of La2O3, SrCO3, and Mn3O4. The Sr and Mn content were strongly affected whether the sputtering gas has included oxygen or not. The film as-deposited at partial O2 pressure Po2 of 0.04m Torr was composed of crystallites with excellent (100) orientation at relatively low substrate temperature Ts. Whether the sputtering gas has included oxygen or not also affected the crystallinity of the films. The 4πMs of as-deposited films increased after post-annealing process, and has reached near that of bulk La1-xSrxMnyO3. The increase of 4πMs seems to be caused by the compensation of the lack of oxygen ions in the perovskite crystal structure. Since the MR response of the films exhibits excellent linearity, these LSMO films seem to be applied for magnetic sensor devices. The linear MR response has remained after post-annealing process.
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