Abstract
ABSTRACT This paper deals with the vibration characteristics of stacked transducers composed of piezoelectric discs, which are main elements of ultrasonic sensors or actuators. The stacked transducers were de-vised in the sense of natural frequencies. Two- or three-layer transducers were fabricated with piezo-electric discs of different diameters. The natural frequencies were determined by the finite element analysis and they were verified by comparing them with experimental results. It appeared that the natural frequencies of the stacked piezoelectric transducers include the natural frequencies of the con-stituent piezoelectric discs and the natural frequencies caused by stacking. Based on these results, it would be possible to predict the vibration characteristics of the stacked piezoelectric transducers in a design process. * 1. 서 론 진동의 전파인 파동이 다양한 분야에 널리 활용되고 있다 (1) . 파동 신호를 이용하는 계측기에 초음파 수위계, 초음파 유량계, 차량 후방 감지기 등이 있고, 파동 에너지를 이용하는 액추에이터에 초음파 모터, 초음파 가공기, 초음파 세척기 등이 있다. 이러한 초음파 센서 또는 액추에이터에 압전 변환기가 많이 사용된다
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