Abstract

Surface energies calculated from measured contact angles between several solutions and test samples, such as Si wafer, Al₂O₃, SiO₂, PTFE(Polytetrafluoroethylene), and DLC(Diamond Like Carbon) films, based on geometric mean method and Lewis acid base method. In order to relate roughness to adhesion force, surface roughness of test samples were scanned large area and small by AFM(Atomic Force Microscopy). Roughness was representative of test samples in large scan area and comparable with AFM tip radius in samll scan area. Adhesion forces between AFM tip and test samples were matched well with order of roughness rather than surface energy. When AFM tips having different radius were used to measure adhesion force on DLC1 film, sharper AFM tip was, smaller adhesion force was measured. Therefore contact area was more important factor to determine adhesion force.

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