Abstract
Voice coil motor is an actuator that employs a non-contact electromagnetic force between its coils and magnets, and is widely used in precision stages on account of its good linearity between current and force. Additionally, these advantages are beneficial for implementing the magnetic levitation mechanism. Unlike the case of general use of a voice coil motor where 1-DOF translational motion is applied, 6-DOF magnetic levitation causes variation in the relative position and orientation between the coil and the magnet. Accordingly, the force constant also changes. In this study, high-level precision positioning of 20 ㎚ was realized through the design and control of a magnetic levitation stage using voice coil motors. In the process, the change in the force of the voice coil motor was found to be approximately 1% within the range of motion. Therefore, the proposed design was verified to be suitable for high-precision stages.
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