ｒｆマグネトロンスパッタ法によるＢｉ‐Ｓｒ‐Ｃａ‐Ｃｕ‐Ｏ薄膜のＸＰＳによる研究

Abstract

The Bi-Sr-Ca-Cu-O thin films were prepared by a rf magnetron sputtering method. By carrying out the XPS (X-ray photoelectron spectroscopy) measurements, we investigated the effects of the substrate temperatures during the preparation and the post-annealing on the compositions of the films. It is clear that relative Cu, Bi and O XPS intensities change with increasing the substrate temperatures. After the post-annealing, the differences of the compositions of the films could not be observed among the substrate temperatures where the films were made.In the O-ls XPS spectra of the as-deposited specimen, peaks at 530 and 532 eV were observed. The positions of the peaks are approximately equal to those of the post-annealed specimen. However, the peak at lower energy side was dominant in the post-annealed specimen, while the peak at higher energy side was dominant in the as-deposited specimen.