Abstract
In this paper we report upon an investigation into the effect of DC bias voltage on the electrical and optical properties of Gallium doped zinc oxide (GZO) film. GZO films were deposited on glass substrate without substrate temperature by RF magnetron sputtering from a ZnO target mixed with 5 wt% <TEX>$Ga_{2}O_{3}$</TEX>. we investigated sample properties of bias voltage change in 0 to -60 V. We were able to achieve as low as <TEX>$5.89{\times}10^{-4}{\Omega}cm$</TEX> and transmittance over 88 %. without substrate heating.
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