Abstract
This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensorimplemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.
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