Abstract
A SAW strain sensor based on Shear Horizontal wave with an 92 ㎒ central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The 41° YX LiNbO₃ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient (K²=17.2%). And to compare with Rayleigh wave mode, 128° YX LiNbO₃ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 ㎑ / % and 0.99, respectively.
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