Abstract
FCM(Fast moving least square reproducing kernel point collocation method) 방식의 simulation tool을 이용하여 전기장으로 구동되는 초소형 전자 렌즈의 구동 특성을 조사·분석하였다. Einzel 렌즈의 retarding mode와 accelerating mode구동에서 포텐셜 분포는 유사하지만, electric field strength는 서로 다른 방향을 갖게 되어 서로 다른 형태의 전자 궤적을 보인다. 동일한 working distance에서 accelerating mode로 구동되는 전자렌즈는 retarding mode로 구동되는 경우보다 매우 높은focusing 전압을 필요로 한다. The analysis of operation characteristics of a miniaturized electrostatic electron lens system called an Einzel lens was performed using a simulation tool of FCM method. The potential distributions of Einzel lenses operated both in retarding and accelerating modes show similar features. But the electric fields determined from the potential distributions show opposite directions, which results in different features in the electron beam trajectory in each mode of operation. For the same working distance, focusing voltage in the accelerating mode is higher than that in the retarding mode.
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