Abstract
We carried out three-dimensional flow analysis in a clean room. Flow field in a robot experiment system, induced from the moving robot, is numerically studied in this paper. The effects of moving robot in a clean room are investigated in order to find the section of dust accumulation. Contamination on the bottom produced from the moving robot is predicted from the analysis results from the flow fields. Results show that a large swirl flow is formed around the moving robot. Consequently, the optimal flow condition can be obtained by controlling the fluid velocity through the fixing of inlet or outlet position.
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