양팔 클러스터장비의 초기 전이 기간 스케줄링

Abstract

A cluster tool used in many kinds of semiconductor processes for improving the performance and the quality of wafers has a simple configuration, but its schedule is not easy because of its parallel processing module, a lack of intermediate buffers, and time constraints. While there have been many studies on its schedule, most of them have focused on full cycles in which identical work cycles are repeated under constant task times. In this research, we suggest strategies of start-up transient scheduling which satisfies time constraints and converges into a desirable steady schedule for full work cycle. The proposed schedules are expected robust under the stationary stochastic task times. Finally, we show that the strategies make schedules enters the desirable steady schedule and robust using the simulation.