규소 고분자 복합체를 이용한 반응소결 질화규소

Abstract

Reaction-bonded Si₃N₄ has cost-reduction merit because inexpensive silicon powder was used as a start material. But its density was not so high enough to be used for structural materials. So the sintered reaction-bonded Si₃N₄ techniques were developed to solve the low density problem. In this study the sintered reaction-bonded Si3N4 manufacturing method by using polymer precursor which recently attained significant interest owing to the good shaping and processing ability was proposed. The formations, properties of reaction-bonded Si₃N₄ from silicon and polysilazane mixture were investigated. High density reaction-bonded Si₃N₄ was manufactured from silicon and silicon-containing preceramic polymers and post-sintering technique. The mixtures of silicon powder and polysilazane were prepared and reaction sintered in N₂ atmosphere at 1350℃ and post-sintered at 1600~1950℃. Density and phase were analyzed and correlated to the resulting material properties.