Abstract
This study presented the effect of membrane thickness on hydrogen permeability. Microvoids on the surface of the membrane should not exist for the exact values of hydrogen permeability. Pd-Cu-Ni hydrogen alloy membranes were fabricated by Ni powder sintering, substrate plasma pretreatment, sputtering and Cu reflow process. And this leaded to void-free surface and dense film of Pd-Cu-Ni hydrogen alloy membrane. Hydrogen permeation test showed that hydrogen permeability increased from 2.7 to <TEX>$15.2ml/cm^2{\cdot}min{\cdot}atm^{0.5}$</TEX> as membrane thickness decreased from 12 to <TEX>$4{\mu}m$</TEX>. This represented the similar trend as a hydrogen permeability of pure palladium membrane based on solution-diffusion mechanism.
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