Abstract
This paper represents development of quartz crystal microbalance (QCM) and usage as a dew point sensor. The temperature of a quartz resonator was controlled precisely from <TEX>$20^{\circ}C$</TEX> to <TEX>$-30^{\circ}C$</TEX> with the ramping rate of <TEX>$0.1^{\circ}C/s$</TEX> by using a custom-made crystal holder housing the quartz resonator associated with a thermoelectric cooler (Peltier cooler), which results in the working range from <TEX>$15.2^{\circ}C$</TEX> to <TEX>$-24.0^{\circ}C$</TEX> based on an accurate holder temperature compensation and temperature effect compensation process. The developed QCM dew point sensor and analysis techniques show very good sensing characteristics at measurement of moist air with the relative humidity from 10 %R.H. to 90 %R.H. generated by a divided-type humidity generator and the dew point temperatures were determined with an accuracy of less than <TEX>${\pm}0.18^{\circ}C$</TEX>, which also showed good agreement with reference values in their error range.
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